PRODUCTION OF ELECTRON-FREE PLASMA BY USING A MAGNETIC FILTER IN RADIO-FREQUENCY DISCHARGE

被引：28
|
作者：
AMEMIYA, H
机构：
[1] RIKEN The Institute of Physical and Chemical Research, Saitama, 351-01, Hirosawa 2-1, Wakoshi
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 10期
关键词：
ELECTRON-FREE; NEGATIVE ION; MAGNETIC FILTER; RADIO FREQUENCY; OXYGEN;
D O I：
10.1143/JJAP.30.2601
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A source plasma is generated in a multipole-type device in oxygen by a radio frequency discharge at 13.56 MHz. A SmCo magnet array is mounted between source and target plasma sections as a magnetic filter. In the target section, almost electron-free plasma is obtained. The device can be operated in the pressure range of 10(-3) to 10(-1) Torr. The plasma densities in source and target plasmas are 10(9)-10(10) cm-3 and 10(8)-10(9) cm-3, respectively.
引用
收藏
页码：2601 / 2605
页数：5
相关论文
共 50 条
  • [41] Collisionless electron heating by capacitive radio-frequency plasma sheaths
    Gozadinos, G
    Vender, D
    Turner, MM
    Lieberman, MA
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2001, 10 (02): : 117 - 124
  • [42] Characterization of a radio-frequency discharge used for downstream plasma oxidation of Si
    Cook, J.G.
    LeBrun, L.
    Zhongming, Li
    Ogryzlo, E.A.
    Journal of Applied Physics, 1995, 77 (04):
  • [43] CHARACTERIZATION OF HYDROPHOBICITY GRADIENTS PREPARED BY MEANS OF RADIO-FREQUENCY PLASMA DISCHARGE
    GOLANDER, CG
    PITT, WG
    BIOMATERIALS, 1990, 11 (01) : 32 - 35
  • [44] Instability and melting of a crystal of microscopic particles in a radio-frequency discharge plasma
    I. V. Schweigert
    V. A. Schweigert
    V. M. Bedanov
    A. Melzer
    A. Homann
    A. Piel
    Journal of Experimental and Theoretical Physics, 1998, 87 : 905 - 915
  • [45] Model of a radio-frequency low electron temperature plasma source
    Rauf, Shahid
    Dorf, Leonid
    Collins, Kenneth
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2018, 27 (07):
  • [46] Neutral Ingestion Effects on Plume Properties of a Radio-Frequency Plasma Discharge
    Caruso, Natalie R. S.
    Walker, Mitchell L. R.
    JOURNAL OF PROPULSION AND POWER, 2018, 34 (01) : 58 - 65
  • [47] Instability and melting of a crystal of microscopic particles in a radio-frequency discharge plasma
    Schweigert, IV
    Schweigert, VA
    Bedanov, VM
    JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, 1998, 87 (05) : 905 - 915
  • [48] PLASMA POLYMERIZATION OF TETRAFLUOROETHYLENE .2. CAPACITIVE RADIO-FREQUENCY DISCHARGE
    MOROSOFF, N
    YASUDA, H
    BRANDT, ES
    REILLEY, CN
    JOURNAL OF APPLIED POLYMER SCIENCE, 1979, 23 (12) : 3449 - 3470
  • [49] Discharge phenomena of an atmospheric pressure radio-frequency capacitive plasma source
    Park, J
    Henins, I
    Herrmann, HW
    Selwyn, GS
    Hicks, RF
    JOURNAL OF APPLIED PHYSICS, 2001, 89 (01) : 20 - 28
  • [50] INVESTIGATION OF A RESONANT RADIO-FREQUENCY DISCHARGE
    GLAZOV, AA
    NOVIKOV, DL
    SOVIET PHYSICS-TECHNICAL PHYSICS, 1958, 3 (10): : 2106 - 2111
12345