PRODUCTION OF ELECTRON-FREE PLASMA BY USING A MAGNETIC FILTER IN RADIO-FREQUENCY DISCHARGE

被引：28
|
作者：
AMEMIYA, H
机构：
[1] RIKEN The Institute of Physical and Chemical Research, Saitama, 351-01, Hirosawa 2-1, Wakoshi
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 10期
关键词：
ELECTRON-FREE; NEGATIVE ION; MAGNETIC FILTER; RADIO FREQUENCY; OXYGEN;
D O I：
10.1143/JJAP.30.2601
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A source plasma is generated in a multipole-type device in oxygen by a radio frequency discharge at 13.56 MHz. A SmCo magnet array is mounted between source and target plasma sections as a magnetic filter. In the target section, almost electron-free plasma is obtained. The device can be operated in the pressure range of 10(-3) to 10(-1) Torr. The plasma densities in source and target plasmas are 10(9)-10(10) cm-3 and 10(8)-10(9) cm-3, respectively.
引用
收藏
页码：2601 / 2605
页数：5
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