PRODUCTION OF ELECTRON-FREE PLASMA BY USING A MAGNETIC FILTER IN RADIO-FREQUENCY DISCHARGE

被引：28

作者：

AMEMIYA, H

机构：

[1] RIKEN The Institute of Physical and Chemical Research, Saitama, 351-01, Hirosawa 2-1, Wakoshi

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 10期

关键词：

ELECTRON-FREE; NEGATIVE ION; MAGNETIC FILTER; RADIO FREQUENCY; OXYGEN;

D O I：

10.1143/JJAP.30.2601

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A source plasma is generated in a multipole-type device in oxygen by a radio frequency discharge at 13.56 MHz. A SmCo magnet array is mounted between source and target plasma sections as a magnetic filter. In the target section, almost electron-free plasma is obtained. The device can be operated in the pressure range of 10(-3) to 10(-1) Torr. The plasma densities in source and target plasmas are 10(9)-10(10) cm-3 and 10(8)-10(9) cm-3, respectively.

引用

页码：2601 / 2605

页数：5