MOLD SHAPING SILICON CRYSTAL-GROWTH WITH A MOLD COATING MATERIAL BY THE SPINNING METHOD

被引:11
作者
HIDE, I
YOKOYAMA, T
MATSUYAMA, T
SAWAYA, K
SUZUKI, M
SASAKI, M
MAEDA, Y
机构
关键词
D O I
10.1016/0022-0248(86)90524-5
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:583 / 589
页数:7
相关论文
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