A PERCOLATION APPROACH TO ION-BEAM INDUCED MODIFICATIONS OF ORGANIC RESISTS

被引：19

作者：

DAVENAS, J ^{[1
]}

XU, XL ^{[1
]}

KHODR, C ^{[1
]}

TREILLEUX, M ^{[1
]}

STEFFAN, G ^{[1
]}

机构：

[1] UNIV LYON 1,ETUD MAT PLAST & BIOMAT,F-69622 VILLEURBANNE,FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90423-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：513 / 516

页数：4

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