TEMPERATURE DETERMINATION IN AN INDUCTIVELY COUPLED RF PLASMA

被引：22

作者：

VISSER, K ^{[1
]}

HAMM, FM ^{[1
]}

ZEEMAN, PB ^{[1
]}

机构：

[1] UNIV STELLENBOSCH,DEPT PHYS,STELLENBOSCH 7600,SOUTH AFRICA

来源：

APPLIED SPECTROSCOPY | 1976年 / 30卷 / 01期

关键词：

D O I：

10.1366/000370276774456516

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：34 / 38

页数：5

共 11 条

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[5]

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GRIEM HR, 1964, PLASMA SPECTROSCOPY, P45

[7] TEMPERATURE DISTRIBUTION IN AN H-MODE RF PLASMA TORCH [J].

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[8] TEMPERATURE AND ELECTRON DENSITY MEASUREMENTS IN AN RF DISCHARGE IN ARGON [J].

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[9] ARRANGEMENT FOR MEASURING SPATIAL DISTRIBUTIONS IN AN ARGON INDUCTION COUPLED RF PLASMA [J].

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DEGALAN, L .

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[10]

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