LOW-PRESSURE OMVPE OF GAAS USING TRIETHYLGALLIUM

被引：12

作者：

KIMURA, K

TAKAGISHI, S

HORIGUCHI, S

KAMON, K

MIHARA, M

ISHII, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 09期

关键词：

D O I：

10.1143/JJAP.25.1393

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1393 / 1396

页数：4

共 25 条

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