PREPARATION OF DEVICE-QUALITY CU(IN,GA)SE-2 THIN-FILMS DEPOSITED BY COEVAPORATION WITH COMPOSITION MONITOR

被引：130
作者：
KOHARA, N
NEGAMI, T
NISHITANI, M
WADA, T
机构：
[1] Central Research Laboratories, Matsushita Electric Industrial Co. Ltd., Soraku-gun, Kyoto, 619-02, 3-4 Hikaridai, Seika-cho
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1995年 / 34卷 / 9A期
关键词：
COMPOUND SEMICONDUCTOR; CHALCOPYRITE; SOLAR CELL; THIN FILM; COEVAPORATION; CUINSE2; COMPOSITION;
D O I：
10.1143/JJAP.34.L1141
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The chemical composition of Cu(In, Ga)Se-2 (CIGS) thin film was monitored in real time during the physical vapor deposition. The temperature of growing CIGS film was found to depend on the composition ratio of Cu/(In+Ga) when the film was deposited under constant heating power. The composition monitoring system can be easily applied to a 3-stage deposition process of the CIGS films. The solar cells (active area: 1 cm(2)) fabricated by using the obtained CIGS absorber layer showed an efficiency of 15.4% under standard AM 1.5 illumination.
引用
收藏
页码：L1141 / L1144
页数：4
相关论文
共 11 条
  • [1] Contreras M. A., 1994, Progress in Photovoltaics: Research and Applications, V2, P287, DOI 10.1002/pip.4670020404
  • [2] HIGH-EFFICIENCY CUINXGA1-XSE2 SOLAR-CELLS MADE FROM (INX,GA1-X)2SE3 PRECURSOR FILMS
    GABOR, AM
    TUTTLE, JR
    ALBIN, DS
    CONTRERAS, MA
    NOUFI, R
    HERMANN, AM
    [J]. APPLIED PHYSICS LETTERS, 1994, 65 (02) : 198 - 200
  • [3] A MODEL FOR THE SUCCESSFUL GROWTH OF POLYCRYSTALLINE FILMS OF CUINSE2 BY MULTISOURCE PHYSICAL VACUUM EVAPORATION
    KLENK, R
    WALTER, T
    SCHOCK, HW
    CAHEN, D
    [J]. ADVANCED MATERIALS, 1993, 5 (02) : 114 - 119
  • [4] COMPOSITION MONITORING METHOD IN CUINSE2 THIN-FILM PREPARATION
    NISHITANI, M
    NEGAMI, T
    WADA, T
    [J]. THIN SOLID FILMS, 1995, 258 (1-2) : 313 - 316
  • [5] NISHITANI M, 1995, 1994 IEEE 1ST WORLD, V1, P222
  • [6] ELECTRONIC PROPERTIES VERSUS COMPOSITION OF THIN FILMS OF CUINSE2
    NOUFI, R
    AXTON, R
    HERRINGTON, C
    DEB, SK
    [J]. APPLIED PHYSICS LETTERS, 1984, 45 (06) : 668 - 670
  • [7] CUINSE2 FOR PHOTOVOLTAIC APPLICATIONS
    ROCKETT, A
    BIRKMIRE, RW
    [J]. JOURNAL OF APPLIED PHYSICS, 1991, 70 (07) : R81 - R97
  • [8] ZNO/CDS/CUINSE2 THIN-FILM SOLAR-CELLS WITH IMPROVED PERFORMANCE
    STOLT, L
    HEDSTROM, J
    KESSLER, J
    RUCKH, M
    VELTHAUS, KO
    SCHOCK, HW
    [J]. APPLIED PHYSICS LETTERS, 1993, 62 (06) : 597 - 599
  • [9] STRUCTURE, CHEMISTRY, AND GROWTH MECHANISMS OF PHOTOVOLTAIC QUALITY THIN-FILM CU(IN,GA)SE-2 GROWN FROM A MIXED-PHASE PRECURSOR
    TUTTLE, JR
    CONTRERAS, M
    BODE, MH
    NILES, D
    ALBIN, DS
    MATSON, R
    GABOR, AM
    TENNANT, A
    DUDA, A
    NOUFI, R
    [J]. JOURNAL OF APPLIED PHYSICS, 1995, 77 (01) : 153 - 161
  • [10] 5FOLD MULTIPLY TWINNED CRYSTALLITES IN CUINSE2
    WADA, T
    NEGAMI, T
    NISHITANI, M
    [J]. APPLIED PHYSICS LETTERS, 1994, 64 (03) : 333 - 335
12