NI-CO ALLOY AS A NEW REFERENCE MATERIAL FOR QUANTITATIVE SURFACE-ANALYSIS

被引：12

作者：

FUJITA, D ^{[1
]}

TANAKA, A ^{[1
]}

GOTO, K ^{[1
]}

HOMMA, T ^{[1
]}

机构：

[1] ULVAC PHI INC,CHIGASAKI,KANAGAWA 253,JAPAN

来源：

SURFACE AND INTERFACE ANALYSIS | 1990年 / 16卷 / 1-12期

关键词：

D O I：

10.1002/sia.740160136

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

For the improvement of quantitative surface analysis using Auger electron spectroscopy (AES) we propose an NiCo alloy system as a candidate for a ‘primary reference material’ to be used for evaluating the accuracy of quantitative surface analysis. A NiCo alloy was chosen for two reasons. Firstly, the concentrations of the alloys (Ni49Co51,Ni75Co25) at the surface and in the near‐surface region were found to be homogeneous, i.e. phenomena such as preferential sputtering and ion irradiation‐induced surface segregation were no observed with angle‐resolved XPS measurements during 1 keV Ar+ ion sputtering. Secondly, the corrections of matrix effects of NiCo alloys, such as the atomic density, the back‐scattering factor and inelastic mean free path corrections, were calculated and found to be negligibly small. Copyright © 1990 John Wiley & Sons Ltd.

引用

页码：183 / 187

页数：5

共 17 条

[1] ALLOY SPUTTERING [J].