CHARACTERISTICS OF ION-BEAM ASSISTED ETCHING OF GAAS USING FOCUSED ION-BEAM - DEPENDENCE ON GAS-PRESSURE

被引：10
作者：
OCHIAI, Y
GAMO, K
NAMBA, S
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1984年 / 23卷 / 06期
关键词：
D O I：
10.1143/JJAP.23.L400
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：L400 / L402
页数：3
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共 11 条
  • [1] SURFACE STUDIES OF AND A MASS BALANCE MODEL FOR AR+ ION-ASSISTED CL-2 ETCHING OF SI
    BARKER, RA
    MAYER, TM
    PEARSON, WC
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (01): : 37 - 42
  • [2] BROWN WL, 1983, P INT ION ENG C ISIA, pA1738
  • [3] PLASMA-ETCHING - DISCUSSION OF MECHANISMS
    COBURN, JW
    WINTERS, HF
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 391 - 403
  • [4] ION-ASSISTED AND ELECTRON-ASSISTED GAS-SURFACE CHEMISTRY - IMPORTANT EFFECT IN PLASMA-ETCHING
    COBURN, JW
    WINTERS, HF
    [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) : 3189 - 3196
  • [5] FET FABRICATION USING MASKLESS ION-IMPLANTATION
    KUBENA, RL
    ANDERSON, CL
    SELIGER, RL
    JULLENS, RA
    STEVENS, EH
    LAGNADO, I
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 916 - 920
  • [6] HIGH-RESOLUTION SPUTTERING USING A FOCUSED ION-BEAM
    KUBENA, RL
    SELIGER, RL
    STEVENS, EH
    [J]. THIN SOLID FILMS, 1982, 92 (1-2) : 165 - 169
  • [7] ION-BEAM ASSISTED ETCHING FOR GAAS DEVICE APPLICATIONS
    LINCOLN, GA
    GEIS, MW
    MAHONEY, LJ
    CHU, A
    VOJAK, BA
    NICHOLS, KB
    PIACENTINI, WJ
    EFREMOW, N
    LINDLEY, WT
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 786 - 789
  • [8] TEMPERATURE DISTRIBUTIONS PRODUCED IN SEMICONDUCTORS BY A SCANNING ELLIPTICAL OR CIRCULAR CW LASER-BEAM
    NISSIM, YI
    LIETOILA, A
    GOLD, RB
    GIBBONS, JF
    [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (01) : 274 - 279
  • [9] MASKLESS ETCHING OF GAAS AND INP USING A SCANNING MICROPLASMA
    OCHIAI, Y
    GAMO, K
    NAMBA, S
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1047 - 1049
  • [10] HIGH-RESOLUTION, ION-BEAM PROCESSES FOR MICROSTRUCTURE FABRICATION
    SELIGER, RL
    KUBENA, RL
    OLNEY, RD
    WARD, JW
    WANG, V
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1610 - 1612
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