ANISOTROPIC POLYSILICON ETCHING WITHOUT HYDROCARBON POLYMER FORMATION

被引：0

作者：

KELLEHER, PJ ^{[1
]}

KAMMERDINER, L ^{[1
]}

机构：

[1] INMOS INC,COLORADO SPRINGS,CO 80935

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 11期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C447 / C447

页数：1

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