ELECTRICAL CHARACTERISTICS AND GROWTH-KINETICS IN DISCHARGES USED FOR PLASMA DEPOSITION OF AMORPHOUS-CARBON

被引：131

作者：

CATHERINE, Y

COUDERC, P

机构：

来源：

THIN SOLID FILMS | 1986年 / 144卷 / 02期

关键词：

D O I：

10.1016/0040-6090(86)90419-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：265 / 280

页数：16

共 33 条

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