ANALYSIS OF IR ABSORPTION MAPPING OF DEFECTS IN LIQUID-ENCAPSULATED CZOCHRALSKI GAAS

被引:0
作者
BROZEL, MR
TUZEMEN, S
机构
[1] Centre for Electronic Materials, UMIST, Manchester, M60 1QD
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1994年 / 28卷 / 1-3期
关键词
GALLIUM ARSENIDE; HOMOGENEITY; DEFECT FORMATION; DISLOCATIONS;
D O I
10.1016/0921-5107(94)90031-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The mapping of EL2 defects and those that give rise to reverse contrast absorption images in semi-insulating GaAs have an inverse spatial correlation in terms of defect concentrations. EL2 defects are known to be associated with arsenic antisites; those that give rise to the reverse contrast image have recently been shown to be arsenic vacancies. We propose that the inverse correlation of these defects results from a simple mechanism involving a perturbation of the reverse Frenkel reaction on the arsenic sublattice, resulting from the presence of dislocations.
引用
收藏
页码:130 / 133
页数:4
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