ELECTRICAL-PROPERTIES OF HALOGEN LAMP RECRYSTALLIZED SILICON FILMS ON SIO2

被引：8

作者：

VU, DP

CHANTRE, A

MINGAM, H

VINCENT, G

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 06期

关键词：

D O I：

10.1063/1.334157

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1682 / 1686

页数：5

共 23 条

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[8] MICROANALYSIS OF SINGLE-CRYSTAL SI RECRYSTALLIZED USING HALOGEN LAMPS [J].

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