MICROSCOPIC CHARACTERIZATION OF MATERIALS BY ION-BEAM AND HYPERFINE INTERACTION ANALYSIS

被引:12
作者
SOARES, JC
机构
[1] Centro de Física Nuclear, Universidade de Lisboa, 1699 Lisboa Codex, Av. Prof. Gama Pinto
关键词
D O I
10.1016/0168-583X(92)95468-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The microscopic characterization of defects and impurities in materials plays a fundamental role both in the field of advanced materials synthesis and processing and in the field of materials properties. With the application of only one method of analysis there is seldom the possibility to get model independent information in a wide range of systems. Ion beam analysis techniques like Rutherford backscattering spectroscopy (RBS), nuclear reaction analysis (NRA), particle induced X-ray emission (PIXE) and elastic recoil detection (ERD) of hydrogen are frequently applied in materials characterization studies but seldom are they combined with hyperfine interaction studies. In the present work, the analytical potential of the combination of RBS/channeling and perturbed angular correlation (PAC) is illustrated using typical results obtained with metallic, semiconductor and insulator systems formed either by crystal growth or by ion implantation and annealing. We consider first Hf-O dumbbells in Be, and In-As pairs in Si. Then we present a detailed analysis of the optoelectronic material LiNbO3 doped during growth or post implanted with hafnium. This impurity can be introduced 100% in different regular lattice sites of the LiNbO3 crystal lattice by changing the crystal growth conditions or by annealing the hafnium implanted crystal.
引用
收藏
页码:215 / 220
页数:6
相关论文
共 17 条
[1]   EPITAXIAL REGROWTH AND LATTICE LOCATION OF INDIUM IMPLANTED IN ARSENIC-PREAMORPHIZED SILICON [J].
ALVES, E ;
DASILVA, MF ;
SOARES, JC ;
MELO, AA ;
MAY, J ;
HASLAR, V ;
SEIDL, P ;
FEUSER, U ;
VIANDEN, R .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4) :580-584
[2]  
ALVES E, 1989, MAT SCI ENG B-FLUID, V34, P189
[3]  
CORREIA JG, COMMUNICATION
[4]   IMPLANTATION AND ANNEALING BEHAVIOR OF GROUP 3 AND V DOPANTS IN SILICON AS STUDIED BY CHANNELING TECHNIQUE [J].
ERIKSSON, L ;
DAVIES, JA ;
JOHANSSON, NG ;
MAYER, JW .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (02) :842-+
[5]  
Feldman L.C., 1986, FUNDAMENTALS SURFACE
[6]  
Kaufman E. N., 1976, Hyperfine Interactions, V1, P485
[7]   DIRECT EVIDENCE FOR SUBSTITUTIONAL ION-IMPLANTED INDIUM DOPANTS IN SILICON [J].
LINDNER, G ;
HOFSASS, H ;
WINTER, S ;
BESOLD, B ;
RECKNAGEL, E ;
WEYER, G ;
PETERSEN, JW .
PHYSICAL REVIEW LETTERS, 1986, 57 (18) :2283-2286
[8]   TEMPERATURE-DEPENDENCE OF THE HYPERFINE INTERACTIONS OF CD-111 IN SILICON [J].
PASQUEVICH, AF ;
VIANDEN, R .
PHYSICAL REVIEW B, 1987, 35 (04) :1560-1565
[9]   COMBINED RBS CHANNELING AND PAC STUDIES OF HAFNIUM-DOPED LINBO3 [J].
REBOUTA, L ;
SOARES, JC ;
DASILVA, MF ;
SANZGARCIA, JA ;
DIEGUEZ, E ;
AGULLOLOPEZ, F .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 45 (1-4) :495-498
[10]   DETERMINATION OF LATTICE SITES FOR EU, HF AND ND IN LINBO3 BY RBS/CHANNELING EXPERIMENTS [J].
REBOUTA, L ;
SOARES, JC ;
DASILVA, MF ;
SANZGARCIA, JA ;
DIEGUEZ, E ;
AGULLOLOPEZ, F .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 50 (1-4) :428-430