A REVIEW OF INSTRUMENTATION USED TO GENERATE MICROWAVE-INDUCED PLASMAS

被引：31
作者：
GOODE, SR
BAUGHMAN, KW
机构：
来源：
APPLIED SPECTROSCOPY | 1984年 / 38卷 / 06期
关键词：
D O I：
10.1366/0003702844554792
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
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页码：755 / 763
页数：9
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