AN OPEN TUBE METHOD OF ZN DIFFUSION IN III-V-COMPOUNDS

被引：19

作者：

PHATAK, SB

机构：

来源：

ELECTRON DEVICE LETTERS | 1982年 / 3卷 / 05期

关键词：

D O I：

10.1109/EDL.1982.25511

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：132 / 134

页数：3

共 8 条

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[4]

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BALIGA, BJ ;

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[7] CONTROL OF ZN DOPING FOR GROWTH OF INP PN JUNCTION BY LIQUID-PHASE EPITAXY [J].

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JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (10) :2278-2284

[8] A NEW APPARATUS FOR MULTILAYER GROWTH BY CHEMICAL VAPOR-DEPOSITION - THE SLIDING-BOAT CLOSE-SPACED TECHNIQUE [J].

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NISHIMAKI, M .

APPLIED PHYSICS LETTERS, 1980, 37 (08) :732-734

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