EFFECTS OF O-2 GAS-PRESSURE IN HEAT-TREATMENT ON SURFACE-MORPHOLOGY AND ELECTRIC PROPERTIES OF FERROELECTRIC BI4TI3O12 THIN-FILMS WITH C-AXIS ORIENTATION

被引：41

作者：

KAKIMI, A ^{[1
]}

OKAMURA, S ^{[1
]}

ANDO, S ^{[1
]}

TSUKAMOTO, T ^{[1
]}

机构：

[1] SCI UNIV TOKYO, FAC SCI & ENGN, DEPT ELECTR & COMP SCI, YAMAGUCHI 756, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1995年 / 34卷 / 9B期

关键词：

FERROELECTRIC; THIN FILM; BI4TI3O12; SPIN-COATING PYROLYSIS; METAL NAPHTHENATE; O-2 GAS PRESSURE; FATIGUE; HYSTERESIS LOOP;

D O I：

10.1143/JJAP.34.5193

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Fabrication of ferroelectric Bi4Ti3O12 thin films was carried out by spin-coating pyrolysis of Bi and Ti naphthenates and successive heat treatment in O-2 gas at various pressures. Heat treatment in O-2 gas at high pressure was effective for the fabrication of c-axis oriented Bi4Ti3O12 thin films with;a smooth surface and improvement of their electric properties. The thin him heat-treated at the O-2 gas pressure of 4.0 x 10(5) Pa was a single phase of Bi4Ti3O12 completely oriented along the c-axis with good ferroelectric properties at room temperature: coercive field of 23 kV/cm, remanent polarization of 1.9 mu C/cm(2), dielectric constant of 45, loss of 0.01 and leakage current density on the order of 10(-9) A/cm(2). The remanent polarization of the thin film was kept constant up to the polarization reversal at 1 x 10(7) cycles.

引用

页码：5193 / 5197

页数：5

共 14 条

[1] PULSED LASER DEPOSITION AND FERROELECTRIC CHARACTERIZATION OF BISMUTH TITANATE FILMS [J].

BUHAY, H ;

SINHAROY, S ;

KASNER, WH ;

FRANCOMBE, MH ;

LAMPE, DR ;

STEPKE, E .

APPLIED PHYSICS LETTERS, 1991, 58 (14) :1470-1472

[2] ELECTRICAL AND OPTICAL PROPERTIES OF FERROELECTRIC BI4TI3O12 SINGLE CRYSTALS [J].

CUMMINS, SE ;

CROSS, LE .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (05) :2268-&

[3] O-2 GAS-PRESSURE EFFECTS ON SURFACE-MORPHOLOGY IN FERROELECTRIC BI4TI3O12 THIN-FILMS FABRICATED BY SPIN-COATING PYROLYSIS [J].

KAKIMI, A ;

OKAMURA, S ;

TSUKAMOTO, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1994, 33 (12A) :L1707-L1709

[4] FABRICATION OF FERROELECTRIC BI4TI3O12 THIN-FILMS BY DIPPING-PYROLYSIS OF METAL NAPHTHENATES AND MICROPATTERNS BY AN ELECTRON-BEAM [J].

KAKIMI, A ;

OKAMURA, S ;

YAGI, Y ;

MORI, K ;

TSUKAMOTO, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1994, 33 (9B) :5301-5304

[5] EXCIMER LASER-ABLATED BISMUTH TITANATE THIN-FILMS [J].

MAFFEI, N ;

KRUPANIDHI, SB .

APPLIED PHYSICS LETTERS, 1992, 60 (06) :781-783

[6] PREPARATION OF BI4TI3O12 FILMS ON A SINGLE-CRYSTAL SAPPHIRE SUBSTRATE WITH ELECTRON-CYCLOTRON RESONANCE PLASMA SPUTTERING [J].

MASUMOTO, H ;

GOTO, T ;

MASUDA, Y ;

BABA, A ;

HIRAI, T .

APPLIED PHYSICS LETTERS, 1991, 58 (03) :243-245

[7]

MASUMOTO H, 1993, FIRST INTERNATIONAL CONFERENCE ON PROCESSING MATERIALS FOR PROPERTIES, P1113

[8] PREPARATION OF C-AXIS-ORIENTED BI4TI3O-12 THIN-FILMS BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION [J].

NAKAMURA, T ;

MUHAMMET, R ;

SHIMIZU, M ;

SHIOSAKI, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B) :4086-4088

[9]

OKAMURA S, 1994, T MRS JAP, V14, P1675

[10] QUANTITATIVE MEASUREMENT OF SPACE-CHARGE EFFECTS IN LEAD ZIRCONATE-TITANATE MEMORIES [J].

SCOTT, JF ;

ARAUJO, CA ;

MELNICK, BM ;

MCMILLAN, LD ;

ZULEEG, R .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (01) :382-388

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