FABRICATION OF A GAS SENSOR USING PENTACENE THIN-FILMS AS A DETECTOR

Highly sensitive gas sensors for both acidic anti basic gases were fabricated based on conducting thin films of polyacene compounds. Gas sensors formed with pentacene thin films deposited on various kinds of substrates were found to exhibit high sensitivity in detecting sub-ppm concentrations of NO2 or Cl-2 by monitoring the conductivity of the thin film. Improvements in the conductance and duration period for detection were achieved by changing the shape of electrodes and substrate. The sensors with PEN thin films initially doped with iodine could detect ppm concentrations of ammonia gas, since iodine molecules were dedoped upon exposure to ammonia, causing the reduction of the conductivity.