PREPARATION OF AMORPHOUS ELECTROCHROMIC TUNGSTEN-OXIDE AND MOLYBDENUM OXIDE BY PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION

被引：65
作者：
TRACY, CE
BENSON, DK
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1986年 / 4卷 / 05期
关键词：
D O I：
10.1116/1.574080
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：2377 / 2383
页数：7
相关论文
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