THE FUTURE OF AUTOMATION FOR HIGH-VOLUME WAFER FABRICATION AND ASIC MANUFACTURING

被引：18

作者：

HUGHES, RA ^{[1
]}

SHOTT, JD ^{[1
]}

机构：

[1] STANFORD UNIV,CTR INTEGRATED SYST,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305

来源：

PROCEEDINGS OF THE IEEE | 1986年 / 74卷 / 12期

关键词：

D O I：

10.1109/PROC.1986.13691

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1775 / 1793

页数：19

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