STUDY OF THE STEPWISE OXIDATION AND NITRIDATION OF SI(111) BY ELECTRON-STIMULATED DESORPTION AND AUGER-SPECTROSCOPY

被引：31

作者：

KNOTEK, ML

HOUSTON, JE

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 03期

关键词：

D O I：

10.1116/1.571429

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：544 / 547

页数：4

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