共 50 条
- [31] Mechanical and environmental degradation of self-assembled monolayer coatings for microelectromechanical systems PROCEEDINGS OF THE ASME/STLE INTERNATIONAL JOINT TRIBOLOGY CONFERENCE, PTS A AND B, 2008, : 867 - 869
- [34] Dielectric Properties of Self-Assembled Monolayer Coatings on a (111) Silicon Surface JOURNAL OF PHYSICAL CHEMISTRY C, 2015, 119 (13): : 7264 - 7274
- [35] Optimization of anodic bonding to MEMS with self-assembled monolayer (SAM) coatings RELIABILITY, TESTING AND CHARACTERIZATION OF MEMS/MOEMS, 2001, 4558 : 234 - 241
- [36] Microstructure and mechanical properties of ceramic/self-assembled monolayer bilayer coatings Journal of Electronic Materials, 2005, 34 : 528 - 533