COMPUTER-SIMULATION OF BORON TRANSPORT IN MAGNETIC CZOCHRALSKI GROWTH OF SILICON

被引：27

作者：

KIM, KM ^{[1
]}

LANGLOIS, WE ^{[1
]}

机构：

[1] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 95120

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 12期

关键词：

D O I：

10.1149/1.2108476

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2586 / 2590

页数：5

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