INFLUENCE OF SUBSTRATE-TEMPERATURE ON THE OPTICAL-PROPERTIES OF EVAPORATED SILICON FILMS

被引：3

作者：

ESQUIVIAS, I

RODRIGUEZ, T

SANZMAUDES, J

SANGRADOR, J

机构：

来源：

THIN SOLID FILMS | 1984年 / 114卷 / 03期

关键词：

D O I：

10.1016/0040-6090(84)90129-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L35 / L37

页数：3

共 13 条

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