LOCALIZED EPITAXIAL-GROWTH OF C54 AND C49 TISI2 ON (111)SI

被引：52

作者：

FUNG, MS

CHENG, HC

CHEN, LJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 12期

关键词：

D O I：

10.1063/1.96263

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1312 / 1314

页数：3

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