STUDY OF NUCLEAR MICROPROBE BEAM HALO USING IBIC

被引：10

作者：

BREESE, MBH

GRIME, GW

WATT, F

机构：

[1] Nuclear Physics Laboratory, Oxford University, Oxford, OX1 3RH, Keble Road

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 77卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(93)95551-F

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

There are many factors which can give rise to a halo around a focused MeV ion beam, and a method of detecting the distribution and determining the amount of beam current in the halo will help to assess its effect on spatial resolution. This paper describes how the technique IBIC (ion beam induced charge) can be used as an extremely sensitive method of imaging and quantifying the beam halo around focused 3 MeV proton beam current of 200 pA and 0.3 fA. It is also shown how the momentum of the beam fraction in the halo can be calculated from its spatial extent in the IBIC images.

引用

页码：243 / 246

页数：4

共 21 条

[1] CHARGE COLLECTION ION MICROSCOPY - IMAGING OF DEFECTS IN SEMICONDUCTORS WITH A POSITIVE-ION MICROBEAM [J].