COMMENTS ON THE HISTORY OF VACUUM PUMPS

被引:12
作者
HABLANIAN, MH
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期
关键词
D O I
10.1116/1.572699
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
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页码:118 / 125
页数:8
相关论文
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