RADIO-FREQUENCY USED TO BOOST PLASMA-DENSITY

被引：0
作者：
SCHOLES, WA
机构：
来源：
RESEARCH & DEVELOPMENT | 1984年 / 26卷 / 12期
关键词：
D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
收藏
页码：44 / 44
页数：1
相关论文
共 50 条
[21]   PLASMA PARAMETERS OF A RADIO-FREQUENCY DISCHARGE [J].
ANDERSON, CA ;
HOPKINS, MB ;
GRAHAM, WG .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01) :448-450
[22]   Radio-frequency plasma spraying of ceramics [J].
Okada, Tomohisa, 1600, (72)
[23]   OVERDENSE RADIO-FREQUENCY PLASMA SOURCE [J].
BERNABEI, S ;
JASSBY, DL ;
HOOKE, WM ;
MOTLEY, RW .
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1974, 19 (06) :737-737
[24]   RADIO-FREQUENCY HEATING OF A COLLISIONLESS PLASMA [J].
ABRAMS, RH ;
LASHINSK.H ;
OHE, T .
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1972, 17 (07) :769-&
[25]   COMPUTER-SIMULATION OF RADIO-FREQUENCY CONFINEMENT OF A PLASMA NEAR CRITICAL DENSITY [J].
GITOMER, SJ ;
SHOHET, JL .
PHYSICS OF FLUIDS, 1977, 20 (06) :1019-1024
[26]   HIGH-DENSITY PLASMA MODE OF AN INDUCTIVELY COUPLED RADIO-FREQUENCY DISCHARGE [J].
AMORIM, J ;
MACIEL, HS ;
SUDANO, JP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :362-365
[27]   Experimental test of models of high-plasma-density, radio-frequency sheaths [J].
Sobolewski, MA .
PHYSICAL REVIEW E, 1999, 59 (01) :1059-1072
[28]   SELF-CONSISTENT MODELLING OF PLASMA DENSITY INCREASE WITH RADIO-FREQUENCY HEATING [J].
Moiseenko, V. E. ;
Stadnik, Yu S. ;
Lyssoivan, A. I. .
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2012, (06) :46-48
[29]   The effects of radio-frequency bias on electron density in an inductively coupled plasma reactor [J].
Sobolewski, Mark A. ;
Kim, Jung-Hyung .
JOURNAL OF APPLIED PHYSICS, 2007, 102 (11)
[30]   Measurements of electron temperature, electron density, and neutral density in a radio-frequency inductively coupled plasma [J].
Hori, T ;
Bowden, MD ;
Uchino, K ;
Muraoka, K ;
Maeda, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (01) :144-151
12345