OXYGEN-BONDING ENVIRONMENTS IN GLOW-DISCHARGE DEPOSITED AMORPHOUS SILICON-HYDROGEN ALLOY-FILMS

被引：432

作者：

LUCOVSKY, G ^{[1
]}

YANG, J ^{[1
]}

CHAO, SS ^{[1
]}

TYLER, JE ^{[1
]}

CZUBATYJ, W ^{[1
]}

机构：

[1] ENERGY CONVERS DEVICES INC,TROY,MI 48084

来源：

PHYSICAL REVIEW B | 1983年 / 28卷 / 06期

关键词：

D O I：

10.1103/PhysRevB.28.3225

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3225 / 3233

页数：9

共 14 条

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[8] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS [J].

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[9] A STRUCTURAL INTERPRETATION OF THE INFRARED-ABSORPTION SPECTRA OF A-SI-H-O ALLOYS [J].

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[10]

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