Physical mechanisms underlying the selective removal of atoms

被引：17

作者：

Gurovich, B. A. ^{[1
]}

Prikhod'ko, K. E. ^{[1
]}

机构：

[1] Russian Res Ctr, Kurchatov Inst, Moscow 123182, Russia

来源：

PHYSICS-USPEKHI | 2009年 / 52卷 / 02期

关键词：

IRRADIATION;

D O I：

10.3367/UFNe.0179.200902d.0179

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

This paper reviews the current understanding of the selective removal of atoms (SRA), a technique that uses ion irradiation to controllably change the chemical composition and properties of polyatomic materials. The main effects involved and the possible mechanisms that govern the process are discussed. It is shown that SRA holds great promise for manufacturing functional nanoelements.

引用

页码：165 / 178

页数：14

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