CHEMICAL VAPOR-DEPOSITION OF SILICON-CARBIDE AND ITS APPLICATIONS

被引：33
作者：
BRUTSCH, R
机构：
来源：
THIN SOLID FILMS | 1985年 / 126卷 / 3-4期
关键词：
D O I：
10.1016/0040-6090(85)90326-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：313 / 318
页数：6
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