CHEMICAL VAPOR-DEPOSITION OF SILICON-CARBIDE AND ITS APPLICATIONS

被引：33

|

作者：

BRUTSCH, R

机构：

来源：

THIN SOLID FILMS | 1985年 / 126卷 / 3-4期

关键词：

D O I：

10.1016/0040-6090(85)90326-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：313 / 318

页数：6

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