AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY ON OZONE TREATED GAAS-SURFACES

被引:86
作者
INGREY, S [1 ]
LAU, WM [1 ]
MCINTYRE, NS [1 ]
机构
[1] UNIV WESTERN ONTARIO,FAC SCI,SURFACE SCI WESTERN,LONDON N6A 5B7,ONTARIO,CANADA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词
D O I
10.1116/1.573770
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:984 / 988
页数:5
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