RAMAN MICROPROBE ANALYSIS OF TUNGSTEN SILICIDE

被引：23

作者：

CODELLA, PJ ^{[1
]}

ADAR, F ^{[1
]}

LIU, YS ^{[1
]}

机构：

[1] INSTRUMENTS SA INC,METUCHEN,NJ 08840

来源：

APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 11期

关键词：

D O I：

10.1063/1.95766

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1076 / 1078

页数：3

共 8 条

[1] REFRACTORY-METAL SILICIDES - THIN-FILM PROPERTIES AND PROCESSING TECHNOLOGY [J].

CHOW, TP ;

STECKL, AJ .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1983, 30 (11) :1480-1497

[2]

LIU YS, 1984, LASER CHEM PROCESSIN, P73

[3]

MURARKA SP, 1983, SILICIDES VLSI APPLI

[4] INITIAL REACTIONS AT THE INTERFACE OF PT AND AMORPHOUS-SILICON [J].

NEMANICH, RJ ;

THOMPSON, MJ ;

JACKSON, WB ;

TSAI, CC ;

STAFFORD, BL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (03) :519-523

[5] INTERFERENCE ENHANCED RAMAN-SCATTERING STUDY OF THE INTERFACIAL REACTION OF PD ON A-SI-H [J].

NEMANICH, RJ ;

TSAI, CC ;

THOMPSON, MJ ;

SIGMON, TW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :685-688

[6] STRUCTURE OF TUNGSTIC ACIDS AND AMORPHOUS AND CRYSTALLINE WO3 THIN-FILMS [J].

RAMANS, GM ;

GABRUSENOKS, JV ;

VEISPALS, AA .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 74 (01) :K41-K44

[7] STRUCTURE-METATHESIS-ACTIVITY RELATIONS OF SILICA SUPPORTED MOLYBDENUM AND TUNGSTEN-OXIDE [J].

THOMAS, R ;

MOULIJN, JA ;

DEBEER, VHJ ;

MEDEMA, J .

JOURNAL OF MOLECULAR CATALYSIS, 1980, 8 (1-3) :161-174

[8] RAMAN-SPECTROSCOPY OF PTSI FORMATION AT THE PT/SI(100) INTERFACE [J].

TSANG, JC ;

YOKOTA, Y ;

MATZ, R ;

RUBLOFF, G .

APPLIED PHYSICS LETTERS, 1984, 44 (04) :430-432

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