IMPROVED CHARGE COLLECTION OF THE BURIED P-I-N A-SI-H RADIATION DETECTORS

被引:1
|
作者
FUJIEDA, I [1 ]
CHO, G [1 ]
CONTI, M [1 ]
DREWERY, J [1 ]
KAPLAN, SN [1 ]
PEREZMENDEZ, V [1 ]
QURESHI, S [1 ]
STREET, RA [1 ]
机构
[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304
关键词
17;
D O I
10.1109/23.106603
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Charge collection in hydrogenated amorphous silicon (a-Si:H) radiation detectors is improved for high LET particle detection by adding thin intrinsic layers to the usual p-i-n structure. This buried p-i-n structure enables us to apply higher bias and the electric field is enhanced. When irradiated by 5.8 MeV α particles, the 5.7 µm thick buried p-i-n detector with bias 300V gives a signal size of 60,000 electrons, compared to about 20,000 electrons with the simple p-i-n detectors. The improved charge collection in the new structure is discussed. The capability of tailoring the field profile by doping a-Si:H opens a way to some interesting device structures. Copyright © 1990 by The Institute of Electrical and Electronics Engineers, Inc.
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页码:124 / 128
页数:5
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