COMPUTER-SIMULATION OF MICROSTRUCTURAL EVOLUTION IN THIN-FILMS

被引：45

作者：

FROST, HJ ^{[1
]}

THOMPSON, CV ^{[1
]}

机构：

[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1988年 / 17卷 / 05期

关键词：

D O I：

10.1007/BF02652132

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：447 / 458

页数：12

共 50 条

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