COMPUTER-SIMULATION OF MICROSTRUCTURAL EVOLUTION IN THIN-FILMS

被引：45
作者：
FROST, HJ [1 ]
THOMPSON, CV [1 ]
机构：
[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1988年 / 17卷 / 05期
关键词：
D O I：
10.1007/BF02652132
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：447 / 458
页数：12
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