ION CLUSTER BEAM DEPOSITION OF PHTHALOCYANINE FILMS

被引：4
作者：
FEJFAR, A
BIEDERMAN, H
机构：
[1] Charles University, Praha 8
来源：
INTERNATIONAL JOURNAL OF ELECTRONICS | 1992年 / 73卷 / 05期
关键词：
D O I：
10.1080/00207219208925766
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The ionized cluster beam technique was investigated as a method which could bridge the gap between evaporation and plasma polymerization in organic thin film deposition. The results achieved for copper phthalocyanine as a model material are reported.
引用
收藏
页码：1051 / 1053
页数：3
相关论文
共 50 条
[31]   Refilling and Planarization of Patterned Surface with Amorphous Carbon Films by Using Gas Cluster Ion Beam Assisted Deposition [J].
Toyoda, Noriaki ;
Hirota, Tomokazu ;
Mashita, Takafumi ;
Yamada, Isao .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (06) :06GH131-06GH134
[32]   CLUSTER BEAM DEPOSITION - OPTIMIZATION OF THE CLUSTER BEAM SOURCE [J].
GATZ, P ;
HAGENA, OF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (04) :2128-2132
[33]   DEPOSITION OF BORON NITRIDE THIN FILMS BY ION BEAM ASSISTED DEPOSITION. [J].
Bricault, R.J. ;
Sioshansi, P. ;
Bunker, S.N. .
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1986, B21 (2-4) :586-587
[34]   Deposition of thin tungsten carbide films by dual ion beam sputtering deposition [J].
Zhu, Fei ;
Chen, Zhi-lei ;
Liu, Ke-zhao ;
Liang, Wei ;
Zhang, Zhengjun .
VACUUM, 2018, 157 :45-50
[35]   Preparation and Characterization of ITO Thin Films Deposition by Ion Beam Assisted Deposition [J].
Kim, Sung Jin ;
Choi, Kyoon ;
Choi, Se Young .
KOREAN JOURNAL OF METALS AND MATERIALS, 2014, 52 (06) :475-484
[36]   Deposition of cubic boron nitride films by ion beam assisted sputter deposition [J].
Ganzetti, R. ;
Gissler, W. .
Materials and Manufacturing Processes, 1994, 9 (03) :507-517
[37]   Highly bactericidal Ag nanoparticle films obtained by cluster beam deposition [J].
Cavaliere, Emanuele ;
De Cesari, Sebastiano ;
Landini, Giulia ;
Riccobono, Eleonora ;
Pallecchi, Lucia ;
Rossolini, Gian Maria ;
Gavioli, Luca .
Nanomedicine-Nanotechnology Biology and Medicine, 2015, 11 (06) :1417-1423
[38]   Characterization of polyaniline thin films prepared by cluster beam deposition methods [J].
Lim, H ;
Kim, BJ ;
Choi, JH .
SYNTHETIC METALS, 2003, 135 (1-3) :81-82
[39]   Tellurium nanophase films prepared by low energy cluster beam deposition [J].
Wang, GH ;
Chen, PP ;
Wang, ZY ;
Han, M ;
Fang, JW ;
Zhang, SY .
THIN SOLID FILMS, 2000, 375 (1-2) :33-36
[40]   DEPOSITION OF THIN-FILMS USING THE IONIZED CLUSTER BEAM METHOD [J].
HUQ, SE ;
MCMAHON, RA ;
AHMED, H .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1990, 5 (07) :771-781
12345