OPTICAL-PROPERTIES AND DAMAGE ANALYSIS OF GAAS SINGLE-CRYSTALS PARTLY AMORPHIZED BY ION-IMPLANTATION

被引：203
作者：
ERMAN, M
THEETEN, JB
CHAMBON, P
KELSO, SM
ASPNES, DE
机构：
[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304
[2] BELL TEL LABS INC,COMMUN RES,MURRAY HILL,NJ 07974
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 10期
关键词：
D O I：
10.1063/1.333785
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
21
引用
收藏
页码：2664 / 2671
页数：8
相关论文
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