EFFECT OF ARGON ADDITION TO SICL4-H2 MIXTURES ON THE OPTICAL-PROPERTIES OF GLOW-DISCHARGE SILICON FILMS

被引：9
作者：
BRUNO, G
CAPEZZUTO, P
CRAMAROSSA, F
机构：
来源：
THIN SOLID FILMS | 1985年 / 129卷 / 3-4期
关键词：
D O I：
10.1016/0040-6090(85)90048-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：217 / 226
页数：10
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