PREPARATION OF NEARLY STOICHIOMETRIC SUPERCONDUCTING Y-BA-CU-O FILMS BY AN MOCVD TECHNIQUE USING OZONE

被引:17
作者
OHNISHI, H [1 ]
HARIMA, H [1 ]
KUSAKABE, Y [1 ]
KOBAYASHI, M [1 ]
HOSHINOUCHI, S [1 ]
TACHIBANA, K [1 ]
机构
[1] KYOTO INST TECHNOL, DEPT ELECTR & INFORMAT SCI, SAKYO KU, KYOTO 606, JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 11期
关键词
CVD as-grown; Metalorganic; Ozone; Superconductor; Thin film; YBaCuO;
D O I
10.1143/JJAP.29.L2041
中图分类号
O59 [应用物理学];
学科分类号
摘要
Superconducting Y-Ba-Cu-O films of nearly stoichiometric composition (Y:Ba:Cu=1:2:3.6) were prepared by an MOCVD technique on MgO(100) infstrates at 650°C without postannealing. By introducing ozone into the reactor, we obtained a film with higher zero resistive temperature (75 K) and better surface morphology and c-axis orientation, compared to a film of the same composition prepared without ozone. © 1990 IOP Publishing Ltd.
引用
收藏
页码:L2041 / L2044
页数:4
相关论文
共 11 条
[1]   Y1BA2CU3O7-DELTA FILM FORMATION BY AN OM-CVD METHOD [J].
ABE, H ;
TSURUOKA, T ;
NAKAMORI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (08) :L1473-L1475
[2]   POSSIBLE HIGH-TC SUPERCONDUCTIVITY IN THE BA-LA-CU-O SYSTEM [J].
BEDNORZ, JG ;
MULLER, KA .
ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1986, 64 (02) :189-193
[3]   INSITU FORMATION OF SUPERCONDUCTING YBA2CU3O7-X THIN-FILMS USING PURE OZONE VAPOR OXIDATION [J].
BERKLEY, DD ;
JOHNSON, BR ;
ANAND, N ;
BEAUCHAMP, KM ;
CONROY, LE ;
GOLDMAN, AM ;
MAPS, J ;
MAUERSBERGER, K ;
MECARTNEY, ML ;
MORTON, J ;
TUOMINEN, M ;
ZHANG, YJ .
APPLIED PHYSICS LETTERS, 1988, 53 (20) :1973-1975
[4]   FABRICATION OF YBA2CU3O7-X SUPERCONDUCTING THIN-FILMS BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION [J].
KANEHORI, K ;
SUGII, N ;
MIYAUCHI, K .
JOURNAL OF SOLID STATE CHEMISTRY, 1989, 82 (01) :103-108
[5]   FORMATION OF AS-GROWN YBACUO THIN-FILMS BY RF MAGNETRON SPUTTERING FROM 3 TARGETS [J].
KURODA, K ;
KOJIMA, K ;
TANIOKU, M ;
YOKOYAMA, K ;
HAMANAKA, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (10) :1797-1801
[6]   PREPARATION AND CHARACTERIZATION OF SUPERCONDUCTING Y-BA-CU-O FILMS BY THE MOCVD TECHNIQUE [J].
OHNISHI, H ;
KUSAKABE, Y ;
KOBAYASHI, M ;
HOSHINOUCHI, S ;
HARIMA, H ;
TACHIBANA, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (06) :1070-1075
[7]   MOLECULAR-BEAM EPITAXIAL-GROWTH OF LAYERED BI-SR-CA-CU-O COMPOUNDS [J].
SCHLOM, DG ;
MARSHALL, AF ;
SIZEMORE, JT ;
CHEN, ZJ ;
ECKSTEIN, JN ;
BOZOVIC, I ;
VONDESSONNECK, KE ;
HARRIS, JS ;
BRAVMAN, JC .
JOURNAL OF CRYSTAL GROWTH, 1990, 102 (03) :361-375
[8]   Y-BA-CU-O FILM GROWTH BY OMCVD USING N2O [J].
TSURUOKA, T ;
KAWASAKI, R ;
ABE, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (10) :L1800-L1802
[9]   TC OF C-AXIS-ORIENTED Y-BA-CU-O FILMS PREPARED BY CVD [J].
YAMANE, H ;
KUROSAWA, H ;
IWASAKI, H ;
MASUMOTO, H ;
HIRAI, T ;
KOBAYASHI, N ;
MUTO, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (07) :L1275-L1276
[10]   EFFECT OF DEPOSITION TEMPERATURE ON THE SUPERCONDUCTING PROPERTIES OF Y-BA-CU-O FILMS PREPARED BY CVD [J].
YAMANE, H ;
KUROSAWA, H ;
HIRAI, T ;
WATANABE, K ;
IWASAKI, H ;
KOBAYASHI, N ;
MUTO, Y .
JOURNAL OF CRYSTAL GROWTH, 1989, 98 (04) :860-866