SINGLE-CRYSTAL SILICON HIGH-Q TORSIONAL OSCILLATORS

被引：106

作者：

KLEIMAN, RN

KAMINSKY, GK

REPPY, JD

PINDAK, R

BISHOP, DJ

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1985年 / 56卷 / 11期

关键词：

D O I：

10.1063/1.1138425

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：2088 / 2091

页数：4

共 18 条

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[9] STUDY OF SUPERFLUID TRANSITION IN 2-DIMENSIONAL HE-4 FILMS [J].

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[10] MICROMACHINING OF SILICON MECHANICAL STRUCTURES [J].

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