ELECTRON-BEAM OXIDATION OF SEMICONDUCTORS (ONE MECHANISM OF ELECTRON-BEAM PROCESSES)

被引：20

作者：

WADA, T

机构：

来源：

关键词：

D O I：

10.1063/1.99209

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1056 / 1058

页数：3

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