ELECTRON-BEAM OXIDATION OF SEMICONDUCTORS (ONE MECHANISM OF ELECTRON-BEAM PROCESSES)

被引：20
作者：
WADA, T
机构：
来源：
APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 13期
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D O I：
10.1063/1.99209
中图分类号：
O59 [应用物理学];
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页码：1056 / 1058
页数：3
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