THE INTERACTION OF CF3 RADICALS AND CF3 RADICAL PRECURSORS WITH SIO2 SURFACES

被引：8
作者：
MCFEELY, FR
YARMOFF, JA
TALEBIBRAHIMI, A
BEACH, DB
机构：
来源：
SURFACE SCIENCE | 1988年 / 206卷 / 03期
关键词：
D O I：
10.1016/0039-6028(88)90140-9
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：371 / 378
页数：8
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