SPUTTERING IN HIGH-VOLTAGE ELECTRON-MICROSCOPE

被引：34
|
作者：
CHERNS, D [1 ]
MINTER, FJ [1 ]
NELSON, RS [1 ]
机构：
[1] ATOM ENERGY RES ESTAB,DIV MET,HARWELL,OXFORDSHIRE,ENGLAND
来源：
NUCLEAR INSTRUMENTS & METHODS | 1976年 / 132卷 / JAN-F期
关键词：
D O I：
10.1016/0029-554X(76)90760-6
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：369 / 376
页数：8
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