HYDROGEN PASSIVATION OF THE OXYGEN-RELATED THERMAL-DONOR DEFECT IN SILICON

被引：52
|
作者：
JOHNSON, NM [1 ]
HAHN, SK [1 ]
机构：
[1] SILTEC CORP,MT VIEW,CA 94043
来源：
APPLIED PHYSICS LETTERS | 1986年 / 48卷 / 11期
关键词：
D O I：
10.1063/1.96697
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：709 / 711
页数：3
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