LONG LIFE PLASMA FILAMENT TYPE ION-SOURCE

被引：5

作者：

FUKUI, R

TAKAGI, K

TSUGUEDA, T

TSUBOI, H

KIKUCHI, R

YABE, E

TAKAYAMA, K

机构：

[1] TOKAI UNIV,INST RES & DEV,HIRATSUKA,KANAGAWA 25912,JAPAN

[2] TOKAI UNIV,DEPT PHYS,HIRATSUKA,KANAGAWA 25912,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90153-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：140 / 142

页数：3

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[3] AN ION-SOURCE WITH PLASMA GENERATOR [J].

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TAKESHIRO, S ;

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[4] ION-SOURCE WITH PLASMA CATHODE [J].

YABE, E .

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[5]

ULVAC N4609 CAT

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