NONUNIFORM STRAIN PROFILES IN CUBIC CDS/GAAS FILMS MEASURED BY REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION AND RAMAN-SPECTROSCOPY

被引:14
作者
SINHA, K [1 ]
MENENDEZ, J [1 ]
NILES, DW [1 ]
HOCHST, H [1 ]
机构
[1] UNIV WISCONSIN,CTR SYNCHROTRON RADIAT,STOUGHTON,WI 53589
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 04期
关键词
D O I
10.1116/1.585765
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report a study of the strain relaxation in zinc-blende CdS films grown on GaAs by molecular beam epitaxy. We use Raman spectroscopy to determine the depth dependence of the strain profile. This dependence is compared with the instantaneous surface strain relaxation measured by reflection high energy electron diffraction during growth. The Raman results show that the strain profile determined by RHEED remains largely "frozen" in the final sample. It is only near the heterostructure interface, where the strain is large, that evidence of additional relaxation is found in the Raman spectrum.
引用
收藏
页码:2202 / 2205
页数:4
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