SPUTTERING YIELD OF CARBON-ATOMS IN ORGANIC MATERIALS FOR OXYGEN BOMBARDMENT

被引：26

作者：

GOKAN, H

ESHO, S

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 05期

关键词：

D O I：

10.1149/1.2115759

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1105 / 1109

页数：5

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[7] INVESTIGATION OF PLASMA-ETCHING MECHANISMS USING BEAMS OF REACTIVE GAS IONS [J].

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